زیر مجموعه: Micro/NANO-Electro-Mechanical-Systems
منتشر شده در 25 اسفند 1392
کتاب طراحی و ساخت MEMS یکی از بهترین مراجع در این زمینه می باشد.
MEMS Design and Fabrication
Mechanical Engineering Series Frank Kreith and Roop Mahajan - Series Editors
Edited by Mohamed Gad-el-Hak
From the Back Cover
As our knowledge of microelectromechanical systems (MEMS) continues to grow, so does The MEMS Handbook. The field has changed so much that this Second Edition is now available in three volumes. Individually, each volume provides focused, authoritative treatment of specific areas of interest. Together, they comprise the most comprehensive collection of MEMS knowledge available, packaged in an attractive slipcase and offered at a substantial savings. This best-selling handbook is now more convenient than ever, and its coverage is unparalleled.
The second volume, MEMS: Design and Fabrication, details the techniques, technologies, and materials involved in designing and fabricating MEMS devices. It begins with an overview of MEMS materials and then examines in detail various fabrication and manufacturing methods, including LIGA and macromolding, X-ray based fabrication, EFAB® technology, and deep reactive ion etching. This book includes three new chapters on polymeric-based sensors and actuators, diagnostic tools, and molecular self-assembly. It is a thorough guide to the important aspects of design and fabrication.
MEMS: Design and Fabrication comprises contributions from the foremost experts in their respective specialties from around the world. Acclaimed author and expert Mohamed Gad-el-Hak has again raised the bar to set a new standard for excellence and authority in the fledgling fields of MEMS and nanotechnology.
نام کتاب : MEMS Design and Fabrication / Second edition /2006
ژبان : English
تعداد صفحات : 647
حجم : 42.6MB
نوع فایل : PDF فشرده شده
رمز فایل : www.iranmems.ir
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